EPS200 Features

Introduction. The Gripping Power, Inc. EPS200 high voltage DC power
supply was designed to drive semiconductor wafer electrostatic clamping devices
in all process conditions, with years of reliable performance. The EPS200 can
replace the COMDEL ESC Series power supplies in most applications.

Features. The EPS200 is microprocessor based and is fully programmable. One
local and three remote operating modes are provided. The unit is available with either
1kV or 2.5kV true floating, bipolar outputs. The high voltage output is continuously
variable, with dynamic output voltage tracking and user defined current limiting.
A back-lit LCD displays voltage, current and status information. The EPS200 has
been field proven in RIE, PECVD and PVD processes.

EPS200 Front Panel Status Display

Local Operation. The local operation mode provides the user the means of testing
programs and diagnosing hardware problems, via the EPS200 front panel, without the
use of a host computer interface.

EPS200 Front Panel Controls

Remote Operation. Serial RS-232, digital, and analog remote control modes are
provided. All electrical interfaces are isolated from the high-voltage output and are
ground referenced. The high-voltage can be turned on and off via a single digital bit
input. An analog input is provided for remote high voltage control. Two digital output
signals are provided to minimize interface problems when replacing mechanical clamp
mechanisms with electrostatic chucks. A digital alarm output signal is also provided.

Programmability. The EPS200 can store up to ten user defined programs that control
the clamping and declamping operation. Each program can be up to 32 steps long. The unit
may be directed to execute any one of the ten stored programs, giving the user maximum
flexibility in both the setup phase, when testing clamp reliability, and in production
operation. All ten of the EPS200 programs are stored in nonvolatile RAM and can be
downloaded to a host computer. The EPS200 programming command set provides the
user optimum flexibility for developing sophisticated clamping algorithms for multiple
process conditions.

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