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EPS200 Rear Panel
High Voltage Connections. The power supply high voltage output is
via
two MHV (BNC) connectors located at rear of the unit. The outer ring of these
connectors is electrically isolated from ground and is not referenced to
the
high-voltage output. Connections to the outer conductors can be terminated
at
a common ground point, or left floating without affecting the performance
of
the EPS200.
Load Connections. For proper operation and continued reliability,
the
high voltage outputs of the EPS200 must be electrically isolated from extremely
high DC bias voltages, high power RF fields or other sources of potential
damage.
It is highly recommended that only accessories manufactured, or specifically
authorized, by Gripping Power, Inc. should be used with the EPS200 when
developing an electrostatic chuck application for plasma processes.
Gripping
Power, Inc. can provide interconnect cables, RF decouplers and other
accessories to meet any specific need.
A typical electrostatic chuck application for a semiconductor plasma process
is
shown below. All of the components are required for proper clamping
operation
and protection of the EPS200 power supply.
EPS200 Typical Installation
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