EPS200 Programming Examples

EPS200 Programming

Introduction. One of the unique features of the EPS200 is its ability
to allow the user to develop complex clamping algorithms using a proprietary
command language. The unit can store up to ten programs that control the
clamping and declamping operation. Each program can be up to 32 steps long.
The unit may be directed to execute any one of the ten stored programs,
giving the user maximum flexibility in both the setup phase, when testing
clamp reliability, and in production operation. All ten of the EPS200
programs are stored in nonvolatile RAM and can be downloaded to a host
computer. The EPS200 programming command set provides the user optimum
flexibility for developing sophisticated clamping algorithms for multiple
process conditions.

Programming Examples. The following program emulates basic electrostatic
chuck power supply functions of clamping and declamping. The program will set
the high voltage setpoint to 800 VDC, wait for the high voltage go off command
and then apply a reverse pulse of 800 VDC for two seconds to discharge the chuck
and release the substrate.

01	TP	; toggle the polarity
02	SO 800	; set the output to 800 VDC
03	ON	; turn on the high voltage
04	WF	; wait for the high voltage off command
05	TP	; toggle polarity
06	ON	; turn on the high voltage
07	ST 2	; start a two second timer
08	WT	; wait for the timer to expire
09	OF	; turn off the high voltage

This program better illustrates the flexibility of the EPS200. An oscillating voltage
can be produced by the EPS200 to discharge the chuck, and more effectively
release the substrate. Digital output bit commands are included as well.

01 TP ; toggle polarity

02 SO 800 ; set the output to 800 VDC

03 CU ; clear clamp is up bit

04 SD ; set clamp is down bit

05 ON ; turn on the high voltage

06 WF ; wait for the high voltage off command

07 TP ; toggle polarity

08 ON ; turn on the high voltage

09 SO 600 ; set the output to 600V

10 ST 6 ; start six second timer

11 WT ; wait for timer to expire

12 TP ; toggle polarity

13 ON ; turn on the high voltage

14 SO 400 ; set the output to 400V

15 ST 4 ; start four second timer

16 WT ; wait for timer to expire

17 TP ; toggle polarity

18 ON ; turn on the high voltage

19 SO 200 ; set the output to 200V

20 ST 2 ; start two second timer

21 WT ; wait for timer to expire

22 OF ; turn high voltage off

23 SU ; set clamp is up bit

24 CD ; clear clamp is down bit

These programs are shown for example only. Some electrostatic chuck
algorithms have been patented. Use of patented algorithms may be a
violation of federal patent law.

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