RS-232 Operation
Introduction. The command set of the EPS300 has been designed to provide
the
user with outstanding process flexibility. In addition to basic on and off
commands,
there are a wide range of reporting, configuration, and control commands.
All
EPS300 commands, except SO, WF, WR and WT can be used in immediate
(direct) mode, via RS-232.
High voltage control commands. The following commands control, and
adjust
parameters related to, the high voltage output.
| Command |
Description |
| CF |
Set high voltage compliance off |
| CN |
Set high voltage compliance on |
| GD |
Ground the high voltage output terminals |
| MN |
Set MultiMode to negative polarity |
| MF |
Set MultiMode off |
| MP |
Set MultiMode to positive polarity |
| OF |
Turn high voltage output off |
| ON |
Turn high voltage output on |
| NP |
Set output voltage to negative polarity |
| PP |
Set output voltage to positive polarity |
| SA |
Set output voltage to the scaled analog input value |
| SB |
Set output voltage back to previous setpoint |
| SC |
Set high voltage compliance window |
| SH |
Shunt the high voltage output terminals |
| SV |
Set high voltage setpoint |
| SI |
Set overcurrent trip point |
| SO |
Set high voltage output level |
| SV |
Set high voltage setpoint |
| TP |
Toggle polarity |
Status information commands. The following commands provide status
information about the high voltage power supply, unit operating parameters,
and the current program status.
| Command |
Description |
| ID |
Return software version |
| MI |
Measure current at terminals |
| MV |
Measure volts at terminals |
| RC |
Return compliance value |
| RI |
Return overcurrent trip point |
| RM |
Report maximum output voltage limit (factory setting) |
| RP |
Return program status |
| RS |
Return status |
| RV |
Return voltage setpoint |
Substrate Detector Control. The EPS300 can support an optional
programmable
substrate detector. The user adjustable parameters allow the EPS300 to
accurately
detect a variety of wafers and substrates.
| Command |
Description |
| DF |
Turn the substrate detector off |
| DG |
Set substrate detector gain/sensitivity |
| DH |
Set substrate detector high threshold |
| DL |
Set substrate detector low threshold |
| DN |
Turn the substrate detector on |
| DZ |
Set substrate detector offset/zero |
| RA |
Return substrate detector analog value |
| RG |
Return substrate detector gain/sensitivity value |
| RH |
Return substrate detector high threshold value |
| RL |
Return substrate detector low threshold value |
| RZ |
Return substrate detector offset/zero value |
Digital output control. The EPS300 provides the user with two digital
output bits
which can be used to emulate mechanical clamp interfaces or be used for any
other
required function. The bits are identified as “Auxiliary Output Bit
1” and “Auxiliary
Output Bit 2.”
The user can set the auxiliary output bits to the preferred state throughout
a program.
Both bits are cleared (set to the off state) at power-on or reset. Each output
can
source or sink (jumper selectable) 500 mA at up to 30 VDC.
| Command |
Description |
| CX 1 |
Clear auxiliary output bit 1 |
| CX 2 |
Clear auxiliary output bit 2 |
| SX 1 |
Set auxiliary output bit 1 |
| SX 2 |
Set auxiliary output bit 2 |
T1, T2 and T3 timer commands. The timer commands allow the user to
reset,
load, start and display the timer data. The EPS300 has three process
timers.
Timer 1 (T1) is a user programmable timer that can be used as a general purpose
countdown timer, when used in conjunction with the WT command. The resolution
of T1 is one second. It has a maximum time period of 59 minutes and 59 seconds.
Timer 2 (T2) tracks the period the high voltage has been on, since timer
2 was last
cleared, using the C2 command. Timer 2 can be used as a chuck or chamber
preventative maintenance timer. The resolution of T2 is one second. It has
a
maximum time period of 59,999 hours, 59 minutes and 59 seconds.
Timer 3 (T3) is the OEM high voltage on timer. This timer cannot be reset
and can
be used by the manufacturer for MTBF information. The resolution of T3 is
one
minute. It has a maximum time period of 59,999 hours and 59 minutes.
| Command |
Description |
| C1 |
Clear timer 1 |
| C2 |
Clear timer 2 |
| R1 |
Read timer 1 |
| R2 |
Read timer 2 |
| R3 |
Read timer 3 |
| RT |
Reload and start timer 1 |
| ST |
Set timer 1 |
Program Control Commands. The EPS300 allows the user to develop and
store
complex chuck and dechuck algorithms using the proprietary scripting language
and
the following program editing and flow control commands.
| Command |
Description |
| AB |
Aborts the current program |
| CA |
Clear all programs |
| CP |
Clear current program |
| LP |
List current program |
| Pn |
Select program 'n' |
| RP |
Return program status |
| RR |
Resume program (after a WR command) |
| WT |
Wait for timer 1 to expire |
| WF |
Wait for high-voltage off command |
| WR |
Wait for resume command |
| XP |
Execute program |
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