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 Introduction. The Gripping Power, Inc. EPS310 high voltage DC power supply was designed to drive semiconductor wafer electrostatic clamping devices in all process conditions, with years of reliable performance. Features. The EPS310 is microprocessor based and is fully programmable. Two remote operating modes, digital and RS-232, are provided. The unit is available with 2.5kV or 5kV, floating, bipolar, center-tapped outputs. The high voltage output is continuously variable, with output voltage tracking and user defined current limiting. The wafer/substrate detector is software configurable, allowing the reliable detection of both conductive and dielectric substrates. Remote Operation. RS-232 and digital remote control modes are provided. All electrical interfaces are isolated from the high-voltage output and are ground referenced or optically isolated. The high-voltage can be turned on and off via a single digital bit input or via an RS-232 command. Two user defined digital output signals are provided to minimize system interface problems when replacing mechanical clamp mechanisms with electrostatic chucks. Programmability. The EPS310 can store up to ten user defined programs that control the clamping and declamping operation. Each program can be up to 32 steps long. The unit may be directed to execute any one of the ten stored programs, giving the user maximum flexibility in both the setup phase, when testing clamp reliability, and in production operation. All ten of the EPS310 programs are stored in nonvolatile RAM and can be downloaded to a host computer. The EPS310 programming command set provides the user optimum flexibility for developing sophisticated clamping algorithms for multiple process conditions. |
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