|
|
|
EPS310 Front Panel
RS-232 Serial Interface. The RS-232 serial interface is a 9-pin, D-style,
subminiature
female connector, located on the front panel. All serial communications meet
RS-232C
requirements. The baud rate can be either 9600 or 19,200 baud. Data length
is 8 bits,
no parity and one stop bit is required. Modem control lines, such as RTS
and CTS,
are not provided.
EPS310 Serial Interface Connector
| Pin |
Description |
Direction |
| 2 |
Transmit Data |
Output |
| 3 |
Receive Data |
Input |
| 5 |
Common |
|
Digital/Analog Remote Interface. The digital and analog interface
is a 25-pin, D-style
subminiature female connector, located on the rear panel. The remote high
voltage go on,
analog monitors, digital outputs, and program select bits are contained in
this connector.
EPS310 Remote Interface Interface Connector
| Pin |
Description |
|
Direction |
| 1 |
Digital source voltage |
|
Input (+12 to +24 VDC) |
| 2 |
Digital common |
|
DC system common or chassis ground |
| 3 |
Reserved |
|
|
| 4 |
ESC power supply alarm/fault |
|
Digital output |
| 5 |
HV go on/off |
|
Digital input (optically isolated) |
| 6 |
Programmed digital output 1 |
|
Digital output |
| 7 |
Programmed digital output 2 |
|
Digital output |
| 8 |
Wafer sense digital output |
|
Digital output |
| 9 |
Wafer sense analog output |
|
Analog output (0-1 VDC or 0-10 VDC) |
| 10 |
Analog common |
|
DC system common or chassis ground |
| 11 |
Vout analog setpoint |
|
Analog input (0-1 VDC or 0-10 VDC) |
| 12 |
Measured output current |
|
Analog output (±1 VDC or ±10 VDC) |
| 13 |
Measured voltage output |
|
Analog output (±1 VDC or ±10 VDC) |
| 14 |
Digital source voltage |
|
Input (+12 to +24 VDC) |
| 15 |
Digital common |
|
DC system common or chassis ground |
| 16 |
Reserved |
|
|
| 17 |
Reserved |
|
|
| 18 |
Program select bit, D0 |
|
Digital input |
| 19 |
Program select bit, D1 |
|
Digital input |
| 20 |
Program select bit, D2 |
|
Digital input |
| 21 |
Reserved |
|
Digital output |
| 22 |
Analog common |
|
DC system common or chassis ground |
| 23 |
Reserved |
|
|
| 24 |
Reserved |
|
|
| 25 |
Reserved |
|
|
All digital outputs can source or sink up to a maximum of 500 mA. All digital
inputs
are optically isolated and require a source input of 12-24 VDC.
Pins 1 and 14 are tied together internally. Pins 2 and 15 are tied together
internally.
Pins 10 and 22 are tied together internally. However, pins 2 and 15 are not
connected
to pins 10 and 22 and and external connection between these pins will not
alter the
performance of the EPS310.
Analog I/O pins 9 and 11 are configured for 0-10 VDC unipolar operation.
Analog
I/O pins 12 and 13 are configured for 0-10 VDC unipolar operation. Consult
the
factory for applications that require alternate analog interfaces.
|
