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EPS310 Front Panel
High Voltage Connections. The power supply high voltage output is
via a
Caton Connector, Series 16, seven-pin circular connector located on the
front
of the unit.
Load Connections. For proper operation and continued reliability,
the high
voltage outputs of the EPS310 must be electrically isolated from extremely
high
DC bias voltages, high power RF fields or other sources of potential
damage.
It is recommended that only accessories manufactured, or specifically
authorized,
by Gripping Power, Inc. should be used with the EPS310 when developing
an electrostatic chuck application for plasma processes. Gripping Power,
Inc.
can provide interconnect cables, RF decouplers and other accessories to
meet any specific need.
A typical electrostatic chuck application for a semiconductor plasma process
is
shown below. All of the components are required for proper clamping operation
and protection of the power supply.
EPS310 Typical Installation
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