EPS310 Programming Examples

EPS310 Programming

Introduction. One of the unique features of the EPS310 is its ability to allow the
user to develop complex clamping algorithms using a proprietary command language.
The unit can store up to ten programs that control the clamping and declamping
operation. Each program can be up to 32 steps long. The unit may be directed
to execute any one of the ten stored programs, giving the user maximum
flexibility in both the setup phase, when testing clamp reliability, and in
production operation. All ten of the EPS310 programs are stored in nonvolatile
RAM and can be downloaded to a host computer. The EPS310 programming
command set provides the user optimum flexibility for developing sophisticated
clamping algorithms for multiple process conditions.

Programming Examples. The following program emulates basic electrostatic
chuck power supply functions of clamping and declamping. The program will set
the high voltage setpoint to 800 VDC, wait for the high voltage go off command
and then apply a reverse pulse of 800 VDC for two seconds to discharge the
chuck and release the substrate.

01	TP	; toggle the polarity
02	SO 800	; set the output to 800 VDC
03	ON	; turn on the high voltage
04	WF	; wait for the high voltage off command
05	TP	; toggle polarity
06	ON	; turn on the high voltage
07	ST 2	; start a two second timer
08	WT	; wait for the timer to expire
09	OF	; turn off the high voltage

This program better illustrates the flexibility of the EPS310. An oscillating voltage
can be produced by the EPS310 to discharge the chuck, and more effectively
release the substrate. Digital output bit commands are included as well.

01 PP ; select positive polarity

02 SO 800 ; set the output to 800 VDC

03 CX 1 ; clear aux output bit 1 - "clamp is up"

04 SX 2 ; set aux output bit 2 - "clamp is down"

05 ON ; turn on the high voltage

06 WF ; wait for the high voltage off command

07 TP ; toggle polarity

08 ON ; turn on the high voltage

09 SO 600 ; set the output to 600V

10 ST 4 ; start four second timer

11 WT ; wait for timer to expire

12 TP ; toggle polarity

13 ON ; turn on the high voltage

14 SO 400 ; set the output to 400V

15 ST 3 ; start three second timer

16 WT ; wait for timer to expire

17 TP ; toggle polarity

18 ON ; turn on the high voltage

19 SO 200 ; set the output to 200V

20 ST 2 ; start two second timer

21 WT ; wait for timer to expire

22 OF ; turn high voltage off

23 SX 1 ; set aux output bit 1 - "clamp is up"

24 CX 2 ; clear aux output bit 2 - "clamp is down"

These programs are shown for example only. Some electrostatic chuck algorithms
have been patented. Use of patented algorithms may be a violation of federal
patent laws.

[Home] [Mission] [Products] [Services] [Profile]
[Contacts] [Employment] [Links]