EPS100 Electrostatic Chuck Power Supply

EPS100 Electrostatic Chuck Power Supply

True floating 1kV DC bipolar output
Compatible with Dorsey Gage, Invax and TOTO electrostatic chucks.
Proven reliability in RIE, PECVD, and PVD processes
Directly replaces the SEMCO HVS1500 in most applications
Remote digital HV on/off control

EPS100 - LCD Display and Operator Controls
Manual setpoint and remote analog setpoint and monitoring
Preprogrammed chuck/dechuck algorithm
Back-lit LCD displays voltage and current
Mounts in a standard 19" equipment rack
Input power: 90-264 VAC, 47-63 Hz
Optional DC input power: 24 VDC, ±15 VDC