EPS120 Electrostatic Chuck Power Supply

EPS120 Electrostatic Chuck Power Supply

True floating 1kV DC bipolar output
Compatible with Dorsey Gage, Invax and TOTO electrostatic chucks.
Proven reliability in RIE, PECVD, and PVD processes
Manual setpoint and remote analog setpoint and monitoring
Remote digital HV on/off control

EPS120 - LCD Display and Operator Controls
Preprogrammed chuck/dechuck algorithm
Back-lit LCD displays voltage and current
Mounts in a standard 9.5" equipment half-rack
Input power: 90-264 VAC, 47-63 Hz
Optional DC input power: 24 VDC, ±15 VDC