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EPS200 Electrostatic Chuck Power Supply
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True floating 1kV or 2.5kV DC bipolar output (center tap optional)
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Compatible with Dorsey Gage, Invax and TOTO electrostatic chucks.
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Proven reliability in RIE, PECVD, and PVD processes
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10 user definable programs, each with 32 steps
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Powerful command language allows complex chuck/dechuck algorithms
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One local and three remote operating modes
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Back-lit, 4 line LCD displays voltage, current and program status
EPS200 - LCD Display and Operator Controls
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RS-232 serial interface
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Remote digital on/off control
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Remote analog setpoint and monitoring
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Mounts in a standard 9.5" equipment half-rack
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Dimensions: 9.5" x 3.5" x 10"
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AC input power: 90-264 VAC, 47-63 Hz
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Optional DC input power: 24 VDC, ±15 VDC
EPS200 - HV Output and Control Interface
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