|
|
|
 |
| EPS310 Embedded Electrostatic Chuck Power Supply |
EPS310 General Specifications
-
True floating, 2.5kV or 5kV, bipolar, center-tapped outputs
-
Single RS-232 serial interface for power supply control and temperature data
-
Remote digital on/off
-
Remote analog monitoring of load voltage and current
-
Remote analog setpoint of output voltage
-
Two user-defined programmable digital outputs
-
Programmable substrate (wafer) presence detector
-
LED status indicators
|
|
|
|
|
|
|
|
EPS310 Interface Connectors |
|
|
|
-
Powerful command language allows complex chuck/dechuck algorithms
-
Programming language is backwardly compatible with the EPS200 and EPS300
-
10 user definable programs, each with 32 steps
-
Meets SEMI S2 requirements
-
Input power: ±15 VDC at 800mA or +24 VDC at 1A
-
Dimensions: 2.50" x 9.58" x 9.90" (H x W x D)
|
|
|
|
|
|
|
|
[Home] [Mission]
[Products] [Services]
[Profile]
[Contacts] [Employment]
[Guestbook] [Links]
Copyright ©2003 Gripping Power, Inc.
All rights reserved. Last Update: 02 May 2005 1300
Email:
sales@grippingpower.com |
