Custom Electrostatic Chuck Applications
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Improved thermal transfer performance; aluminum and ceramic hybrid design.
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Enables faster RIE and ICP etch rates, resulting in improved tool throughput.
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Precision manufactured - Flatness
£3
mm and surface roughness Ra
£ 0.25
mm.
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Helium leak rate £ 0.15 sccm with
a backside gas pressure of 10 Torr.
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Nominal operation from 500 to 2,500 VDC; current draw 10uA typical.
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Continuous operation from -50°C to +200°C.
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Wear resistant ceramic finish survives high-energy plasma chemistries.
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Custom, unique, low-volume ESC applications are our speciality.
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Made in the USA; shorter lead times for standard products and new designs.
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