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Electrostatic Chucks.
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Electrostatic Chucks.
General Purpose ESCs - Precision manufactured ceramic
and aluminum
materials. For use in RIE, ICP, PVD and other semiconductor process
applications.
High performance ESCs - Sapphire dielectric and
aluminum construction for
low-particulate generation, long service life and excellent thermal
performance.
Application Specific ESCs - Custom designed ESCs
for a wide range of applications.
Power Supplies and Accessories.
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Electrostatic Chuck Power Supplies.
EPS100 - 1kV bipolar output, analog/digital interface,
19" width. Replaces the
SEMCO HVS1500 with greater reliability and lower cost.
EPS120 - 1kV bipolar output, analog/digital interface,
9.5" width.
EPS200 - 1kV or 2.5kV bipolar output, analog, digital
and RS232 interface,
programmable, 9.5" width. Industry proven flexibility and reliability.
EPS300 - 1kV or 2kV bipolar output, digital
I/O and serial interface, programmable.
Lower cost, compact size, designed for embedded OEM applications.
EPS310 - 2.5kV or 5kV bipolar output, digital I/O,
and serial interface,
programmable. Similar to EPS300 but with advanced performance and features.
EPS320 - All of the same features of the EPS310,
but with dual, independent outputs.
EPS440 - Multi-channel, high-speed ESC power supply
system. Coming Soon.
EPS520 - Dual-output, high-power ESC power supply.
Coming Soon.
Accessories - RF decoupler, high-voltage cables,
high-impedance cables.
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