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Electrostatic chuck power supply

Gripping Power, Inc. manufactures high voltage power supplies and accessories for the semiconductor fabrication industry.

Since 2002, Gripping Power has produced electrostatic chuck power supplies which are programmable, bipolar, floating and tightly regulated. They are compatible with monopolar and bipolar Coulombic and Johnsen-Rahbek electrostatic chucks and have proven reliability in applications such as RIE, ICP, PECVD and EUV lithography. They can support 150mm, 200mm and 300mm semiconductor wafer production down to the 10nm class and process development at the 5nm node.

High voltage cable assemblies, RF traps and OEM specific packaging options are also available.

SEMICON West 2018

Visit us at SEMICON West 2018, South Hall, Booth 322

For more information about our products and services, please contact us at:

Gripping Power, Inc.
11930 44th St. North
Clearwater, FL 33762 USA
(727) 572-4100 tel
(727) 561-0808 fax

Email: sales@GrippingPower.com

15 years of excellence