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Electrostatic chuck power supply

Company

Since 2002, Gripping Power has produced electrostatic chuck power supplies which are bipolar, fully-floating and tightly regulated. They are compatible with monopole and bipolar Coulombic and Johnsen-Rahbek electrostatic chucks and have proven reliability in applications such as RIE, ICP, PECVD and EUV lithography. They can support 150mm, 200mm and 300mm semiconductor wafer production down to the 10nm node and process development at the 7nm node.

High voltage cable assemblies, RF traps and OEM specific packaging options are also available.

We can also provide electronic circuit design, PCB assembly, cable harness fabrication, aluminum and steel enclosure fabrication and complete industrial PC-based automation systems for semiconductor process industry applications via our associated vendors.