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Electrostatic chuck power supplies


Since 2002, Gripping Power has produced electrostatic chuck power supplies which are bipolar, fully-floating and tightly regulated. They are compatible with monopole and bipolar Coulombic and Johnsen-Rahbek electrostatic chucks and have proven reliability in applications such as RIE, ICP, PECVD and EUV lithography. They can support 150mm, 200mm and 300mm semiconductor wafer production down to the 14nm node and 450mm process development at the 10nm node.

In 2017, our product line was expanded to include 15W and 30W proportional and regulated high voltage DC-DC converters and high voltage switching modules, for industrial, scientific and medical applications.

High voltage cable assemblies, RF traps and OEM specific packaging options are also available.