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Electrostatic chuck power supplies


Gripping Power has been designing and manufacturing process instrumentation for the semiconductor and materials processing industry since 2002.

The company was formed when a private investment group headed by John F. Kohls, CEO of Nova Research and Engineering, acquired Applied Energy Technologies (AET) in 2002. AET was an early-stage company that focused on microprocessor controlled power sub-systems. AET had developed a portfolio of advanced high voltage power supply technologies and intelligent battery charging systems.

Applied Energy Technologies developed their first high voltage product, the EPS100 1kV bipolar electrostatic chuck (ESC) power supply, in 1998 –

Power supply

The fully programmable EPS200 and the EPS300 ESC power supplies were initially developed in 1999 and 2001, respectively.