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Electrostatic chuck power supply

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Press Release
Gripping Power to Introduce New Products at SEMICON 2018

Press Release
Applied Energy Technologies Announces Operational Changes
November 1, 2002 — Applied Energy Technologies, Inc. announced today that a private investment group headed by John F. Kohls, CEO of Nova Research and Engineering, Inc. has purchased the assets of the company. A new company, Gripping Power, Inc., comprised of the acquired assets of Applied Energy Technologies, Inc, and those provided by the new ownership, will begin operations as of December 1, 2002.

Semiconductor International MagazineNew Products
Electrostatic Chuck Power Supply
July 2001 — The EPS300 electrostatic chuck power supply is designed for OEM embedded applications and provides performance, proven reliability and process flexibility. It features analog, digital and RS232 interfaces, fully floating, variable 1 kV output, ten user definable clamp/declamp algorithms and demonstrated compatibility with industry-standard electrostatic chucks. Power requirement is 24 VDC or ±15 VDC.

Semiconductor International MagazineNew Products
Electrostatic Chuck Power Supplies
July 1999 — The EPS line of electrostatic chuck power supplies is designed to provide reliability and process flexibility. All models have local and remote operating modes, true floating 1kV or 2.5kV bipolar outputs and reliability in RIE, PECVD and PVD processes. The EPS200 features digital, analog, and RS-232 interfaces and 10 user definable chuck/dechuck algorithms. The EPS100 and EPS120 provide basic features for cost sensitive applications.