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Electrostatic chuck power supply

RF Traps, Cables and Accessories

HIGH VOLTAGE RF TRAPS

RF trap
  • Optimized for 13.56 MHz operation.
  • Dielectric ratings from 2kVAC to 6kVAC.
  • Single-ended and common-mode models.
  • Mounts to the RF enclosure of most process equipment.
  • OEM custom and high power designs available.

HIGH VOLTAGE CABLE ASSEMBLIES

High voltage interconnect cables