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Electrostatic Chucks
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GPA Series
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Process Development
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High Voltage RF Traps
Optimized for 13.56 MHz operation.
Dielectric ratings from 2kVAC to 6kVAC.
Single-ended and common-mode models.
Mounts near the RF enclosure of most plasma process equipment.
OEM custom and high power designs available.
More information coming soon.