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Electrostatic chuck power supply

High Voltage RF Traps

RF trap
  • Optimized for 13.56 MHz operation.
  • Dielectric ratings from 2kVAC to 6kVAC.
  • Single-ended and common-mode models.
  • Mounts near the RF enclosure of most plasma process equipment.
  • OEM custom and high power designs available.
More information coming soon.