- Improved thermal transfer performance; aluminum and ceramic hybrid design
- Precision manufactured – Flatness ≤3µm and surface roughness Ra ≤ 0.25µm
- Helium leak rate ≤ 0.15 sccm with a backside gas pressure of 10 Torr
- Nominal operation from 500 to 3000 VDC; current draw 10uA typical
- Wear resistant ceramic finish survives high-energy plasma etch and cleaning processes
- Custom, unique, low-volume ESC applications are our specialty
- Made in the USA; shorter lead times for standard products and new designs
More information coming soon.