Electrostatic Chucks

Improved thermal transfer performance; aluminum and ceramic hybrid design
Precision manufactured – Flatness ≤3µm and surface roughness Ra ≤ 0.25µm
Helium leak rate ≤ 0.15 sccm with a backside gas pressure of 10 Torr
Nominal operation from 500 to 3000 VDC; current draw 10uA typical
Wear resistant ceramic finish survives high-energy plasma etch and cleaning processes
Custom, unique, low-volume ESC applications are our specialty
Made in the USA; shorter lead times for standard products and new designs