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Electrostatic Chucks

Electrostatic Chuck
  • Improved thermal transfer performance; aluminum and ceramic hybrid design
  • Precision manufactured – Flatness ≤3µm and surface roughness Ra ≤ 0.25µm
  • Helium leak rate ≤ 0.15 sccm with a backside gas pressure of 10 Torr
  • Nominal operation from 500 to 3000 VDC; current draw 10uA typical
  • Wear resistant ceramic finish survives high-energy plasma etch and cleaning processes
  • Custom, unique, low-volume ESC applications are our specialty
  • Made in the USA; shorter lead times for standard products and new designs

More information coming soon.