High Voltage Power Supplies

GPA Series – Electrostatic chuck drivers and high voltage power supplies (12W to 25W)

GPX Series – Advanced programmable electrostatic chuck power supplies (25W to 50W)

GPD Series – High-power, dual-output electrostatic chuck drivers and high voltage power supplies (150W per channel)

GPE Series – Embedded bipolar electrostatic chuck power supplies (25W to 50W)