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High Voltage Power Supplies

GPA Series – Flexible electrostatic chuck drivers and high voltage power supplies
GPA Electrostatic Chuck Power Supply

GPX Series – Advanced programmable electrostatic chuck power supplies
GPX Electrostatic Chuck Power Supply

GPE Series – Embedded bipolar electrostatic chuck power supplies
GPE Electrostatic Chuck Power Supply

GPM Series – Compact high voltage modules and electrostatic chuck drivers.