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High Voltage Power Supplies

GPX Series – Advanced programmable electrostatic chuck power supplies (25W to 50W)
GPX Electrostatic Chuck Power Supply
GPD Series – High-power, dual-output electrostatic chuck drivers and high voltage power supplies (150W per channel)

GPD Electrostatic Chuck Power Supply

GPE Series – Embedded bipolar electrostatic chuck power supplies (25W to 50W)
GPE Electrostatic Chuck Power Supply
GPA Series – Electrostatic chuck drivers and high voltage power supplies (12W to 25W)
GPA Electrostatic Chuck Power Supply
GPM Series – Compact high voltage modules and electrostatic chuck drivers.