GPA Series – High Voltage Power Supplies
The GPA Series are low-cost, regulated, high-voltage power supplies which are available configured as entry-level electrostatic chuck drivers, general purpose bipolar power supplies or unipolar bias power supplies.
Features
• Modest-power capability for driving 200mm or 300mm Coulombic or Johnsen-Rahbek electrostatic chucks
• Operation can be controlled via analog and digital I/O or the USB interface
• Bipolar units feature solid state switches for long-life and fast response
• Fully isolated, floating outputs.
Electrical
All GPA series power supplies are factory configured to operate from 24VDC.
Mechanical
Dimensions (GPA900/GPA600): 84.0mm (H) x 210.3mm (W) x 300mm (D), 2U rack enclosure
Panel Width: 482.5 mm (full-rack)
Dimensions (GPA300/GPA150): 42.0mm (H) x 400.8mm (W) x 300mm (D), 1U rack enclosure
Panel Width: 241.3 mm (half-rack)
GPA Series High Voltage Electrostatic Chuck Drivers*
GPA Series EB variant power supplies feature a single, 9kVDC or 6kVDC, ground-referenced, reversible output and are optimized for electrostatic chuck applications.
GPA900EB – 0 to ±9.0kV Coming soon
GPA600EB – 0 to ±6.0kV Coming soon
GPA Series Electrostatic Chuck Drivers*
GPA Series E variant power supplies feature fully-floating, reversible, high voltage outputs on two MHV connectors and are optimized for electrostatic chuck applications.
GPA300E – 0 to ±3.0kV, 25W fully floating, electrostatic chuck power supply with reversible polarity.
GPA150E – 0 to ±1.5kV, 12W fully floating, electrostatic chuck power supply with reversible polarity.
GPA Series Bipolar Power Supplies*
GPA Series B variant power supplies feature a ground referenced high voltage output via a single high voltage connector.
GPA300B – 0 to ±3.0kV, 25W high voltage power supply with reversible polarity.
GPA150B – 0 to ±1.5kV, 12W high voltage power supply with reversible polarity.
GPA Series Unipolar Power Supplies*
GPA Series U variant power supplies feature a single, ground referenced high voltage output via a single high voltage connector.
GPA300U – 0 to 3.0kV, 25W unipolar, high voltage power supply
GPA150U – 0 to 1.5kV, 12W unipolar, high voltage power supply
GPA Series U variant power supplies are factory configured for negative or positive output. Specify P or N suffix when ordering.
The GPA150E electrostatic chuck power power supply can replace the ESC3 (±1.5kV), HVS1500 (±1.5kV) and the legacy EPS100 (±1.0kV) in most electrostatic chuck applications.