Gripping Power logo

GPA Series – High Voltage Power Supplies

The GPA Series are low-cost, regulated, high-voltage power supplies which are available configured as entry-level electrostatic chuck power supplies, general purpose bipolar power supplies or unipolar bias power supplies.
GPA Electrostatic Chuck Power Supply
Features
• Modest-power capability for driving 200mm or 300mm Coulombic or Johnsen-Rahbek electrostatic chucks
• Operation can be controlled via analog and digital I/O or the USB interface

Electrical
All GPA series power supplies are factory configured to operate from 24VDC.

Mechanical
Dimensions: 41.2mm (H) x 210.3mm (W) x 300mm (D), 1U rack enclosure
Panel Width: 241.3 mm (half-rack)

GPA Series Electrostatic Chuck Power Supplies*
GPA Series E variant power supplies feature a floating, reversible high voltage output on two MHV connectors and are optimized for electrostatic chuck applications.
GPA300E – 0 to ±3.0kV, 25W fully floating, electrostatic chuck power supply with reversible polarity.
GPA150E – 0 to ±1.5kV, 12W fully floating, electrostatic chuck power supply with reversible polarity.

GPA Series Floating High Voltage Power Supplies*
GPA Series F variant power supplies feature a floating, reversible high voltage output on two MHV connectors.
GPA300F – 0 to ±3.0kV, 25W fully floating, high voltage power supply with reversible polarity.
GPA150F – 0 to ±1.5kV, 12W fully floating, high voltage power supply with reversible polarity.

GPA Series Bipolar Power Supplies*
GPA Series B variant power supplies feature a ground referenced high voltage output via a single MHV connector.
GPA300B – 0 to ±3.0kV, 25W high voltage power supply with reversible polarity.
GPA150B – 0 to ±1.5kV, 12W high voltage power supply with reversible polarity.

GPA Series Unipolar Power Supplies*
GPA Series U variant power supplies feature a single, ground referenced high voltage output via a single MHV connector.
GPA300U – 0 to 3.0kV, 25W unipolar, high voltage power supply
GPA150U – 0 to 1.5kV, 12W unipolar, high voltage power supply

GPA Series U variant power supplies are factory configured for negative or positive output. Specify P or N suffix when ordering.

The GPA150E electrostatic chuck power power supply can replace the ESC3 (±1.5kV), HVS1500 (±1.5kV) and the legacy EPS100 (±1.0kV) in most electrostatic chuck applications.

*Available Q4 2018