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Electrostatic chuck power supply

GPA Series – High Voltage Power Supplies

The GPA Series are low-cost, regulated, high-voltage power supplies which are available configured as entry-level electrostatic chuck power supplies, general purpose bipolar power supplies or unipolar bias power supplies.

GPA Series Electrostatic Chuck Power Supplies*
GPA300E – 0 to ±3.0kV, 25W bipolar, fully floating, electrostatic chuck power supply
GPA150E – 0 to ±1.5kV, 12W bipolar, fully floating, electrostatic chuck power supply

GPA Series Floating High Voltage Power Supplies*
GPA300F – 0 to ±3.0kV, 25W bipolar, fully floating, high voltage power supply
GPA150F – 0 to ±1.5kV, 12W bipolar, fully floating, high voltage power supply

GPA Series Bipolar Power Supplies*
GPA300B – 0 to ±3.0kV, 25W bipolar, high voltage power supply
GPA150B – 0 to ±1.5kV, 12W bipolar, high voltage power supply

GPA Series Unipolar Power Supplies*
GPA300U – 0 to 3.0kV, 25W unipolar, high voltage power supply
GPA150U – 0 to 1.5kV, 12W unipolar, high voltage power supply

GPA Series B and U variant power supplies have a single, ground referenced high voltage output.

GPA Series U variant power supplies are factory configured for negative or positive output. Specify P or N suffix when ordering.

All GPA series power supplies operate from 24VDC and include rack-mounting hardware.

The GPA150E electrostatic chuck power power supply can replace the ESC-3 (±1.5kV), HVS1500 (±1.5kV) and the legacy EPS100 (±1.0kV) in most electrostatic chuck applications.

*Available Q3 2018