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GPD Series – High Power, Dual Output Power Supplies

The GPD Series are regulated, high-power, high-voltage power supplies with dual independent outputs which can be configured as electrostatic chuck drivers or bipolar and unipolar power supplies for general purpose laboratory applications which require dual, independent outputs.

GPD Electrostatic Chuck Power Supply

Features
• High-power capability for driving 200mm or 300mm Coulombic or Johnsen-Rahbek electrostatic chucks
• High-current, floating outputs for demanding laboratory requirements, such as capacitor charging applications
• Operation can be controlled via analog and digital I/O or the high-speed USB interface
• Models with reversible outputs features high current, solid state switches for long-life and fast response
• Independent operation of each channel
• Electrical interlock provided

Electrical
All GPD series power supplies are factory configured to operate from 100-240VAC, 50/60Hz.

Mechanical
Dimensions: 84.0mm (H) x 430mm (W) x 425mm (D), 2U rack enclosure
Panel Width: 482.5 mm (full-rack)

GPD Series Electrostatic Chuck Driver*
GPD Series E variant power supplies are optimized for electrostatic chuck applications and provide two fully-floating, reversible, high voltage outputs.
GPD250E – 0 to ±2.5kV, 150W per channel fully floating, electrostatic chuck power supply with reversible polarity.
GPD100E – 0 to ±1.0kV, 150W per channel fully floating, electrostatic chuck power supply with reversible polarity.

GPD Series Floating High Voltage Power Supplies*
GPA Series F variant power supplies feature two floating, reversible high voltage outputs.
GPD250F – 0 to ±2.5kV, 150W per channel power supply with fully floating, reversible polarity.
GPD100F – 0 to ±1.0kV, 150W per channel power supply with fully floating, reversible polarity.

GPD Series Bipolar Power Supplies*
GPD Series B variant power supplies feature two bipolar, ground referenced high voltage outputs.
GPD250B – 0 to ±2.5kV, 150W per channel power supply with reversible, ground referenced outputs.
GPD100B – 0 to ±1.0kV, 150W per channel power supply with reversible, ground referenced outputs.

GPD Series Unipolar Power Supplies*
GPD Series U variant power supplies feature two unipolar ground referenced high voltage outputs.
GPD250U – 0 to ±2.5kV, 150W per channel unipolar power supply with ground referenced outputs.
GPD100U – 0 to ±1.0kV, 150W per channel unipolar power supply with ground referenced outputs.

GPA Series U variant power supplies are factory configured for negative or positive output. Specify P or N suffix when ordering.

EAR99 variants (GPD100C) and custom configurations are available.

The GPD100E power power supply can replace the ES Series (±1.0kV) in most electrostatic chuck applications.

*Available Q2 2019