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GPM Series – High Voltage Power Supply Modules

The GPM Series are lower-cost, regulated, high-voltage modules which can be factory configured as electrostatic chuck drivers or general purpose bipolar or unipolar power supplies.
GPM High Voltage Module
Features
• Operation can be controlled via analog and digital interface
• Compact in size and can be mounted in any orientation

Electrical
All GPM series power supplies are factory configured to operate from 24VDC.

GPM Series Floating Electrostatic Chuck Driver*
GPM Series E variant power supplies are electrostatic chuck drivers which feature a preprogrammed release algorithm and a bipolar high voltage output on two MHV connectors.
GPM600E – 0 to ±6.0kV, 50W, center-point ground referenced, electrostatic chuck driver.
GPM300E – 0 to ±3.0kV, 25W fully floating, electrostatic chuck driver.
GPM150E – 0 to ±1.5kV, 12W fully floating, electrostatic chuck driver.

GPM Series Floating High Voltage Power Supplies*
GPM Series F variant power supplies feature a floating, reversible high voltage output on two MHV connectors.
GPM300F – 0 to ±3.0kV, 25W fully floating, high voltage power supply with reversible polarity.
GPM150F – 0 to ±1.5kV, 12W fully floating, high voltage power supply with reversible polarity.

GPM Series Bipolar Power Supplies*
GPM Series B variant power supplies feature a ground referenced bipolar, high voltage output via a single MHV connector.
GPM300B – 0 to ±3.0kV, 25W high voltage power supply with reversible polarity.
GPM150B – 0 to ±1.5kV, 12W high voltage power supply with reversible polarity.

GPM Series Unipolar Power Supplies*
GPM Series U variant power supplies feature a ground referenced unipolar, high voltage output via a single MHV connector.
GPM300U – 0 to 3.0kV, 25W unipolar, high voltage power supply
GPM150U – 0 to 1.5kV, 12W unipolar, high voltage power supply

GPM Series U variant power supplies are factory configured for negative or positive output. Specify P or N suffix when ordering.

*Available Q4 2018