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GPX Series – Electrostatic Chuck Power Supplies

The GPX series are bipolar, floating, high-power, fully-programmable, electrostatic chuck power supplies for 200mm, 300mm and 450mm semiconductor wafer processing. They are compatible with Coulombic and Johnsen-Rahbek electrostatic chucks in applications such as RIE, ICP, PECVD and EUV lithography.
GPX Electrostatic Chuck Power Supply
Features
• High-power capability for driving large-area Johnsen-Rahbek electrostatic chucks
• Efficient switch-mode topology runs cool without forced air
• Output center-point can be fully-floating, ground referenced or biased
• Voltage output follows user defined chuck and dechuck algorithms
• Up to eight different chuck and dechuck programs can be edited and stored for process flexibility
• Declamp waveform frequencies of up to 10 cycles per second
• Constant voltage and constant current regulation modes
• Operation can be controlled by the front panel, analog and digital I/O, RS-232 serial or the USB interface
• EtherCAT® and ModBus TCP/IP network interface options available
• Wafer sensor adapts to various chuck sizes and RF delivery systems
• Small size conserves instrument rack space

Electrical
GPX series power supplies can be factory configured to operate from 24VDC or 100-240 VAC 50/60Hz.

Mechanical
Dimensions: 82.5mm (H) x 210.3mm (W) x 300mm (D), 2U rack enclosure
Panel Width: 241.3 mm (half-rack)

GPX Series Electrostatic Chuck Power Supplies *
GPX800 – Coming soon
GPX600 – 0 to ±6.0kV (2x ±3.0kV), 50W bipolar, fully floating, electrostatic chuck power supply
GPX300 – 0 to ±3.0kV (2x ±1.5kV), 25W bipolar, fully floating, electrostatic chuck power supply
GPX150 – 0 to ±1.5kV (2x ±750V), 12W bipolar, fully floating, electrostatic chuck power supply

The GPX series power supplies can replace the 645, 646, ECU, ESC10 and the EPS200 power supplies in all electrostatic chuck applications.

*Available Q4 2018